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Latent track formation in silicon irradiated by 30 MeV fullerenes

1998106 citationsJournal Article

Authors

A. Dunlop · Commissariat à l'Énergie Atomique et aux Énergies Alternatives

G. Jaskierowicz · Laboratoire des Solides Irradiés

S. Della‐Negra · Institut National de Physique Nucléaire et de Physique des Particules

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Diamond and Carbon-based Materials Research

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 146, Issue 1-4, pp. 302-308

DOI: 10.1016/s0168-583x(98)00509-6

Field-Weighted Citation Impact: 4.77

Latent track formation in silicon irradiated by 30 MeV fullerenes | Researchclopedia