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Advanced wafer thinning technology and feasibility test for 3D integration
2013
84 citations
Journal Article
Field-Weighted Citation Impact:
7.45
Advanced wafer thinning technology and feasibility test for 3D integration | Researchclopedia
Disco (japan)
Kousuke Suzuki
·
Dai Nippon Printing (Japan)
T. Nakamura
·
Fujitsu (Japan)
Takayuki Ohba
·
The University of Tokyo