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Thermal stability of ultra-thin CoSi2 films on Si(100)-2 × 1 surfaces | Researchclopedia

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Thermal stability of ultra-thin CoSi2 films on Si(100)-2 × 1 surfaces

19978 citationsJournal Article

Authors

H. Ikegami · Nagoya University

Hiroya Ikeda · Nagoya University

Shigeaki Zaima · Nagoya University

Y. Yasuda · Nagoya University

Topics & Keywords

Semiconductor materials and interfaces Surface and Thin Film Phenomena Advanced Materials Characterization Techniques

UN Sustainable Development Goals

Life below water

Publication Details

Published in: Applied Surface Science

Volume 117-118, pp. 275-279

DOI: 10.1016/s0169-4332(97)80093-1

Field-Weighted Citation Impact: 0.52