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Ultra-deep LIGA process and its applications

200117 citationsJournal Article

Authors

Yao Cheng · National Synchrotron Radiation Research Center

B.-Y. Shew · National Synchrotron Radiation Research Center

Minking K. Chyu · University of Pittsburgh

Ping‐Hei Chen · National Taiwan University

Topics & Keywords

Advancements in Photolithography Techniques Advanced X-ray Imaging Techniques Advanced Surface Polishing Techniques

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Volume 467-468, pp. 1192-1197

DOI: 10.1016/s0168-9002(01)00606-4

Field-Weighted Citation Impact: 1.31

Ultra-deep LIGA process and its applications | Researchclopedia