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On the structure of (Ti, Al)N-PVD coatings

1987111 citationsJournal Article

Authors

O. Knotek · RWTH Aachen University

T. Leyendecker · CemeCon (Germany)

Topics & Keywords

Metal and Thin Film Mechanics GaN-based semiconductor devices and materials MXene and MAX Phase Materials

Publication Details

Published in: Journal of Solid State Chemistry

Volume 70, Issue 2, pp. 318-322

DOI: 10.1016/0022-4596(87)90071-5

Field-Weighted Citation Impact: 2.59

On the structure of (Ti, Al)N-PVD coatings | Researchclopedia