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Modeling rhenium metallization of a silicon-rich (001) 6H-SiC surface

20040 citationsJournal Article

Authors

D. R. Wiff · United States Air Force Research Laboratory

W. V. Lampert · United States Army Research Office

C. J. Eiting · Qynergy (United States)

Garrett McDaniel · Ensco (United States)

Keith M. Glassford

Topics & Keywords

Silicon Carbide Semiconductor Technologies Semiconductor materials and devices Semiconductor materials and interfaces

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Materials Science in Semiconductor Processing

Volume 8, Issue 4, pp. 497-501

DOI: 10.1016/j.mssp.2004.07.002

Field-Weighted Citation Impact: 0.00

Modeling rhenium metallization of a silicon-rich (001) 6H-SiC surface | Researchclopedia