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Evaluation of OKI SOI technology

200717 citationsJournal Article

Authors

Y. Ikegami · High Energy Accelerator Research Organization

Y. Arai · High Energy Accelerator Research Organization

K. Hara · University of Tsukuba

M. Hazumi · High Energy Accelerator Research Organization

H. Ikeda · Japan Aerospace Exploration Agency

H. Ishino · Tokyo Institute of Technology

Topics & Keywords

Advancements in Semiconductor Devices and Circuit Design Integrated Circuits and Semiconductor Failure Analysis Silicon and Solar Cell Technologies

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Volume 579, Issue 2, pp. 706-711

DOI: 10.1016/j.nima.2007.05.272

Field-Weighted Citation Impact: 4.64

Evaluation of OKI SOI technology | Researchclopedia

· High Energy Accelerator Research Organization

H. Miyake · Osaka University

A. Mochizuki · University of Tsukuba

S. Terada · High Energy Accelerator Research Organization

T. Tsuboyama · High Energy Accelerator Research Organization

Y. Unno · High Energy Accelerator Research Organization