Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

Back to research

Planar channeling effects in Si(100)

198528 citationsJournal Article

Authors

Michael Current · Certis USA (United States)

T. C. Smith · Motorola (United States)

Topics & Keywords

Semiconductor materials and interfaces Crystallography and Radiation Phenomena Integrated Circuits and Semiconductor Failure Analysis

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 6, Issue 1-2, pp. 336-348

DOI: 10.1016/0168-583x(85)90655-x

Field-Weighted Citation Impact: 2.35

Planar channeling effects in Si(100) | Researchclopedia