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Energy-loss image formation in scanning transmission ion microscopy

198853 citationsJournal Article

Authors

J.C. Overley · University of Oregon

R. M. S. Schofield · University of Oregon

J.D. Macdonald · University of Oregon

H.W. Lefevre · University of Oregon

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Advanced Electron Microscopy Techniques and Applications

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 30, Issue 3, pp. 337-341

DOI: 10.1016/0168-583x(88)90022-5

Field-Weighted Citation Impact: 8.55

Energy-loss image formation in scanning transmission ion microscopy | Researchclopedia