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Tensile testing of microfabricated thin films

199739 citationsJournal Article

Authors

Hiroshi Ogawa · Advanced Engineering Services (Japan)

Kimichi Suzuki · Shonan Institute of Technology

Shinji Kaneko · Olympus (Japan)

Yoshiaki Nakano · Shonan Institute of Technology

Yasuaki Ishikawa · Advanced Engineering Services (Japan)

T. Kitahara · Advanced Engineering Services (Japan)

Topics & Keywords

Metal and Thin Film Mechanics Laser and Thermal Forming Techniques Advanced MEMS and NEMS Technologies

Publication Details

Published in: Microsystem Technologies

Volume 3, Issue 3, pp. 117-121

DOI: 10.1007/s005420050067

Field-Weighted Citation Impact: 2.13

Tensile testing of microfabricated thin films | Researchclopedia