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Few collisions approach for threshold sputtering

198587 citationsJournal Article

Authors

Y. Yamamura · Max Planck Institute for Plasma Physics

J. Bohdansky · Max Planck Institute for Plasma Physics

Topics & Keywords

Ion-surface interactions and analysis Diamond and Carbon-based Materials Research Laser-induced spectroscopy and plasma

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Vacuum

Volume 35, Issue 12, pp. 561-571

DOI: 10.1016/0042-207x(85)90316-1

Field-Weighted Citation Impact: 2.73

Few collisions approach for threshold sputtering | Researchclopedia