Surface Band Structure of Electron Inversion Layers on Vicinal Planes of Si(100)

We have found new minigaps in inversion layers on Si surfaces tilted at $\ensuremath{\theta}$ from (100) at ${k}_{\mathrm{F}}=0.85(\frac{2\ensuremath{\pi}}{a})sin\ensuremath{\theta}, (\frac{2\ensuremath{\pi}}{a})sin\ensuremath{\theta}, \mathrm{and} 1.15(\frac{2\ensuremath{\pi}}{a})sin\ensuremath{\theta}$. Our results confirm the surface band-structure model of Sham et al., demonstrate that both intervalley and intravalley minigaps exist, and show that the minibands, expected for two-dimensional electron gas with a one-dimensional superlattice, have been realized in inversion layers with $\ensuremath{\theta}\ensuremath{\lesssim}3\ifmmode^\circ\else\textdegree\fi{}$.