Heavy-ion range profiles and associated damage distributions

Abstract Detailed distributions of the ranges of heavy ions in amorphous targets and of the associated radiation damage have been obtained for low (keV) incident-ion energies, neglecting electronic stopping. Moments of the distributions (mean depth, straggling, and so on) and some distributions have also been computed with electronic stopping taken into account for dimensionless energies ∊ up to ∼10-100. These calculations are exact within the LSS theory; in particular, nuclear and electronic stopping are separated, the target is amorphous and infinite, collisions are binary, and electronicstopping is included as a continuous retardation, proportional to the velocity of the moving ion. Results have been obtained for various ratios of projectile and target mass, and for some compound targets. Interpretation of the results is discussed, and possible experimental verifications suggested.