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Magnetron sputtering: a review of recent developments and applications | Researchclopedia

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Magnetron sputtering: a review of recent developments and applications

20001,992 citationsReview

Authors

Peter Kelly · University of Salford

R.D. Arnell · University of Salford

Topics & Keywords

Metal and Thin Film Mechanics High-Temperature Coating Behaviors Diamond and Carbon-based Materials Research

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Vacuum

Volume 56, Issue 3, pp. 159-172

DOI: 10.1016/s0042-207x(99)00189-x

Field-Weighted Citation Impact: 22.08