Formation of the ordered array of Al magic clusters on Si(111)7×7

Deposition of Al onto the Si(111)7\ifmmode\times\else\texttimes\fi{}7 surface held at temperatures ranging from 475 to 600 \ifmmode^\circ\else\textdegree\fi{}C has been found to result in the formation of a superlattice of the identical-size nanoclusters (magic clusters). The Al magic clusters appear to have the structure similar to that reported recently for the magic clusters of Ga and In on Si(111): each cluster contains six metal atoms linked by three Si atoms. The present results reveal that at the early stages of deposition all the group III metals demonstrate a distinct tendency for the formation of the magic clusters on Si surfaces.