Gripping tools for handling and assembly of microcomponents

200321 citationsJournal Article

Authors

D. Petrovic · TU Wien

Gordana Popović · TU Wien

Elias Chatzitheodoridis · AT&S (Austria)

O. Del Medico

A. Almansa · TU Wien

Franz Sümecz · TU Wien

W. Brenner · TU Wien

H. Detter

Abstract

In this paper a vacuum gripper for handling of microstructures in MST will be presented as well as the design, production and testing of two types of mechanical micro-grippers used for handling and assembly of microcomponents. One of them is with the possibility of optical force sensing.

Topics & Keywords

Advanced MEMS and NEMS Technologies Advanced Measurement and Metrology Techniques Advanced Surface Polishing Techniques

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Volume 1, pp. 247-250

DOI: 10.1109/miel.2002.1003186

Field-Weighted Citation Impact: 0.35