New thermoelectric components using microsystem technologies

2004370 citationsJournal Articlegreen Open Access

Authors

H. Böttner · Fraunhofer Institute for Physical Measurement Techniques

J. Nurnus · Fraunhofer Institute for Physical Measurement Techniques

Alexander Gavrikov · Fraunhofer Institute for Physical Measurement Techniques

Gerd Kühner · Fraunhofer Institute for Physical Measurement Techniques

Martin Jägle · Fraunhofer Institute for Physical Measurement Techniques

C. Kunzel · Fraunhofer Institute for Physical Measurement Techniques

Abstract

This work describes the first thermoelectric devices based on the V-VI-compounds Bi/sub 2/Te/sub 3/ and (Bi,Sb)/sub 2/Te/sub 3/ which can be manufactured by means of regular thin film technology in combination with microsystem technology. Fabrication concept, material deposition for some 10-μm-thick layers and the properties of the deposited thermoelectric materials will be reported. First device properties for Peltier-coolers and thermogenerators will be shown as well as investigations on long term and cycling stability. Data on metal/semiconductor contact resistance were extracted form device data. Device characteristics like response time for a Peltier-cooler and power output for a thermogenerator will be compared to commercial devices.

Topics & Keywords

Advanced Thermoelectric Materials and Devices Advanced Thermodynamics and Statistical Mechanics Thermal Radiation and Cooling Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Journal of Microelectromechanical Systems

Volume 13, Issue 3, pp. 414-420

DOI: 10.1109/jmems.2004.828740

Field-Weighted Citation Impact: 10.04