The quantitative analysis of thin specimens

SUMMARY Results are reported concerning the use of an energy dispersive X‐ray detector to carry out the analysis of thin foils in the electron microscope. The combination of a thin specimen and the extreme stability of the energy dispersive X‐ray detector enables the experimental determination of a calibration curve of X‐ray production—detection efficiency vs characteristic X‐ray energy. Quantitative analysis can be carried out using the calibration curve without reference to standards at the time of analysis.