Chemical vapour deposition of antimony chalcogenides with positional and orientational control: precursor design and substrate selectivity

201454 citationsJournal Articlehybrid Open Access

Authors

Sophie L. Benjamin · University of Southampton

C.H. de Groot · University of Southampton

Andrew L. Hector · University of Southampton

Ruomeng Huang · University of Southampton

E. Koukharenko · University of Southampton

William Levason · University of Southampton

Gillian Reid ·

Abstract

A series of alkylchalcogenostibines have been synthesised and employed as precursors for the chemical vapour deposition of Sb2Te3 and Sb2Se3. Variations in substrate and temperature give different film morphologies, and patterned arrays can be deposited using substrate selectivity.

Topics & Keywords

Chalcogenide Semiconductor Thin Films Quantum Dots Synthesis And Properties Advanced Thermoelectric Materials and Devices

Publication Details

Published in: Journal of Materials Chemistry C

Volume 3, Issue 2, pp. 423-430

DOI: 10.1039/c4tc02327g

Field-Weighted Citation Impact: 1.49

Command Palette

Chemical vapour deposition of antimony chalcogenides with positional and orientational control: precursor design and substrate selectivity

Authors

Abstract

Topics & Keywords

Publication Details