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Hydroxide catalysis bonding of silicon carbide

200731 citationsJournal Articlegreen Open Access

Authors

A. A. van Veggel · University of Glasgow

Daan van den Ende

J. Bogenstahl · Max Planck Society

Sheila Rowan · University of Glasgow

W. R. Cunningham · University of Glasgow

Henk Nijmeijer · Eindhoven University of Technology

Topics & Keywords

Advanced Surface Polishing Techniques 3D IC and TSV technologies Advanced ceramic materials synthesis

Publication Details

Published in: Journal of the European Ceramic Society

Volume 28, Issue 1, pp. 303-310

DOI: 10.1016/j.jeurceramsoc.2007.06.002

Field-Weighted Citation Impact: 1.34

Hydroxide catalysis bonding of silicon carbide | Researchclopedia