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Realisation and metrological characterisation of thickness standards below 100�nm
2004
16 citations
Journal Article
Field-Weighted Citation Impact:
0.94
Realisation and metrological characterisation of thickness standards below 100�nm | Researchclopedia
·
Physikalisch-Technische Bundesanstalt
I. Busch
·
Physikalisch-Technische Bundesanstalt
S. Sch�dlich
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Fraunhofer Institute for Material and Beam Technology
A. Schindler
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Leibniz Institute of Surface Engineering
W. Frank
·
Leibniz Institute of Surface Engineering
D. Hirsch
·
Leibniz Institute of Surface Engineering
M. Procop
·
Federal Institute For Materials Research and Testing
Uwe Beck
·
Federal Institute For Materials Research and Testing