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Radiation damage in the TEM and SEM

20042,045 citationsReview

Authors

R.F. Egerton · University of Alberta

P. Li · University of Alberta

Marek Malac · University of Alberta

Topics & Keywords

Electron and X-Ray Spectroscopy Techniques Nuclear Physics and Applications Advancements in Photolithography Techniques

Publication Details

Published in: Micron

Volume 35, Issue 6, pp. 399-409

DOI: 10.1016/j.micron.2004.02.003

Field-Weighted Citation Impact: 11.67

Radiation damage in the TEM and SEM | Researchclopedia