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Measurement of Thin Film Mechanical Properties Using Nanoindentation

1992992 citationsJournal Article

Authors

George M. Pharr

Topics & Keywords

Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research Advanced Surface Polishing Techniques

Publication Details

Published in: MRS Bulletin

Volume 17, Issue 7, pp. 28-33

DOI: 10.1557/s0883769400041634

Field-Weighted Citation Impact: 16.84

Measurement of Thin Film Mechanical Properties Using Nanoindentation | Researchclopedia