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The energy balance at substrate surfaces during plasma processing

2001350 citationsJournal Article

Authors

G. M. W. Kroesen · Eindhoven University of Technology

Topics & Keywords

Plasma Diagnostics and Applications Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Vacuum

Volume 63, Issue 3, pp. 385-431

DOI: 10.1016/s0042-207x(01)00350-5

Field-Weighted Citation Impact: 8.71

The energy balance at substrate surfaces during plasma processing | Researchclopedia