Structural Characterization of SiF<sub>4</sub>, SiH<sub>4</sub> and H<sub>2</sub> Hot-Wire-Grown Microcrystalline Silicon Thin Films with Large Grains
20016 citationsJournal Article
Field-Weighted Citation Impact: 1.74
Structural Characterization of SiF<sub>4</sub>, SiH<sub>4</sub> and H<sub>2</sub> Hot-Wire-Grown Microcrystalline Silicon Thin Films with Large Grains | Researchclopedia