Hydroxylation of polymethylsiloxane surfaces by oxidizing plasmas

Abstract The reaction of a radiofrequency‐excited oxygen plasma with the surfaces of cured and uncured polymethylsiloxane produces intense hydroxylation of the surface region as followed by FMIR spectroscopy. Characteristic infrared features indicative of intraor intermolecular hydrogen bonding are evident. Plasma oxidation differs markedly from thermal oxidation processes. Reactions of polymethylsiloxane with nitrogen and air plasmas were also investigated and compared to corona reactions of oxygen, nitrogen, and air. In air corona, nitrogen moieties appear to be introduced. The behavior of polymethylsiloxane surfaces in oxidizing acids is also described.