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Sputtering studies with the Monte Carlo Program TRIM.SP

1984911 citationsJournal Article

Authors

J.P. Biersack · Max Planck Institute for Plasma Physics

W. Eckstein · Max Planck Institute for Plasma Physics

Topics & Keywords

Ion-surface interactions and analysis Fusion materials and technologies Metal and Thin Film Mechanics

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Applied Physics A

Volume 34, Issue 2, pp. 73-94

DOI: 10.1007/bf00614759

Field-Weighted Citation Impact: 50.89

Sputtering studies with the Monte Carlo Program TRIM.SP | Researchclopedia