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Thermal characterization of a microheater for micromachined gas sensors

200496 citationsJournal Article

Authors

M. Baroncini · Gestione Sistemi per l’Informatica (Italy)

P. Placidi · Gestione Sistemi per l’Informatica (Italy)

G.C. Cardinali · Institute for Microelectronics and Microsystems

A. Scorzoni · University of Perugia

Topics & Keywords

Gas Sensing Nanomaterials and Sensors Mechanical and Optical Resonators Advanced MEMS and NEMS Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 115, Issue 1, pp. 8-14

DOI: 10.1016/j.sna.2004.03.012

Field-Weighted Citation Impact: 5.72

Thermal characterization of a microheater for micromachined gas sensors | Researchclopedia