Parallel-plate MEMS mirror design for large on-resonance displacement

20029 citationsJournal Article

Authors

David A. B. Miller · Stanford University

Abstract

We present an electrostatically actuated MEMS mirror with 65 /spl mu/m of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.

Topics & Keywords

Advanced MEMS and NEMS Technologies Photonic and Optical Devices Advanced Surface Polishing Techniques

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

DOI: 10.1109/omems.2000.879642

Field-Weighted Citation Impact: 1.02