Measurement of Sheet Resistivities with the Four-Point Probe

19581,563 citationsJournal Article

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Abstract

Correction factors are evaluated for the measurement of sheet resistirities on two-dimensional rectangular and circular samples with the four-point probe. Diffused surface layers can be treated as two-dimensional structures, but the factors are also useful in obtaining body resistivities on thin samples.

Topics & Keywords

Surface and Thin Film Phenomena Microwave and Dielectric Measurement Techniques Non-Destructive Testing Techniques

Publication Details

Published in: Bell System Technical Journal

Volume 37, Issue 3, pp. 711-718

DOI: 10.1002/j.1538-7305.1958.tb03883.x

Field-Weighted Citation Impact: 5.07

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Measurement of Sheet Resistivities with the Four-Point Probe

Authors

Abstract

Topics & Keywords

Publication Details