Scanning microellipsometry for extraction of truetopography

19955 citationsJournal Article

Authors

Michael G. Somekh · University of Nottingham

Abstract

The amplitude and phase distributions at the back focal plane of a scanning interferometer are used to determine the phase of the optical reflection coefficient. This value for phase change is then used to correct the overall phase measured with the interferometer, so that pure topography measurement is achieved.

Topics & Keywords

Optical measurement and interference techniques Advanced Measurement and Metrology Techniques Digital Holography and Microscopy

Publication Details

Published in: Electronics Letters

Volume 31, Issue 5, pp. 358-359

DOI: 10.1049/el:19950278

Field-Weighted Citation Impact: 1.46

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Scanning microellipsometry for extraction of truetopography

Authors

Abstract

Topics & Keywords

Publication Details