Wafer-scale 3D integration of InGaAs image sensors with Si readout circuits

In this work, we modified our wafer-scale 3D integration technique, originally developed for Si, to hybridize InP-based image sensor arrays with Si readout circuits. InGaAs image arrays based on the InGaAs layer grown on InP substrates were fabricated in the same processing line as silicon-on-insulator (SOI) readout circuits. The finished 150-mm-diameter InP wafer was then directly bonded to the SOI wafer and interconnected to the Si readout circuits by 3D vias. A 1024 × 1024 diode array with 8-µm pixel size is demonstrated. This work shows the wafer-scale 3D integration of a compound semiconductor with Si.