Surface acoustic wave velocity in single-crystal AlN substrates

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Authors

Gang Bu · Rensselaer Polytechnic Institute

D. Čiplys · Rensselaer Polytechnic Institute

M. S. Shur · Rensselaer Polytechnic Institute

L. J. Schowalter · Rensselaer Polytechnic Institute

Sandra Schujman · Rensselaer Polytechnic Institute

R. Gaška · Sensor Electronic Technology (United States)

Abstract

The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S11-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C44 to be 122 +/- 1 GPa.

Topics & Keywords

Acoustic Wave Resonator Technologies GaN-based semiconductor devices and materials Metal and Thin Film Mechanics

Publication Details

Published in: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Volume 53, Issue 1, pp. 251-254

DOI: 10.1109/tuffc.2006.1588412

Field-Weighted Citation Impact: 4.03

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Surface acoustic wave velocity in single-crystal AlN substrates

Authors

Abstract

Topics & Keywords

Publication Details