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Scalable Microwave ECR Plasma Source for Industrial PVD-Applications

19930 citationsJournal Article

Authors

M. Jung · Max Planck Society

R. Koetter-Faulhaber

F. Leuterer · Max Planck Institute for Plasma Physics

M. Muenich · Max Planck Society

R. Wilhelm · Max Planck Institute for Plasma Physics

Topics & Keywords

Microwave Engineering and Waveguides

Publication Details

Published in: Max Planck Digital Library

Field-Weighted Citation Impact: 0.00

Scalable Microwave ECR Plasma Source for Industrial PVD-Applications | Researchclopedia