A 128 × 128 CMOS bio-sensor array for extracellular recording of neural activity

A CMOS sensor array for monitoring neural signals of living cells with 128 /spl times/ 128 pixels in a 1 mm/sup 2/ area is described. A standard 0.5 /spl mu/m, 5 V CMOS process extended by top electrodes covered by a relatively thin bio-compatible dielectric is used. Detection circuitry is based on a sensor-MOSFET mismatch-compensating current-mode technique.