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Advanced Sensor Technology Based on Oxide Thin Film—MEMS Integration

200025 citationsJournal Article

Authors

Harry L. Tuller · Massachusetts Institute of Technology

Richard Mlcak · Boston Micromachines (United States)

Topics & Keywords

Mechanical and Optical Resonators Force Microscopy Techniques and Applications Analytical Chemistry and Sensors

UN Sustainable Development Goals

Reduced inequalities

Publication Details

Published in: Journal of Electroceramics

Volume 4, Issue 2-3, pp. 415-425

DOI: 10.1023/a:1009916122253

Field-Weighted Citation Impact: 1.01

Advanced Sensor Technology Based on Oxide Thin Film—MEMS Integration | Researchclopedia