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Sputtering by ion bombardment theoretical concepts

1981488 citationsBook Chapter

Authors

Topics & Keywords

Ion-surface interactions and analysis Metal and Thin Film Mechanics Integrated Circuits and Semiconductor Failure Analysis

UN Sustainable Development Goals

Climate action

Publication Details

Published in: Topics in applied physics

DOI: 10.1007/3540105212_7

Field-Weighted Citation Impact: 58.85

Sputtering by ion bombardment theoretical concepts | Researchclopedia