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The study of wet etching on GaN surface by potassium hydroxide solution

201647 citationsJournal Article

Authors

Yung‐Yu Lai · National Yang Ming Chiao Tung University

Shih‐Chieh Hsu · Tamkang University

Hua-Sheng Chang · Tamkang University

YewChung Sermon Wu · National Yang Ming Chiao Tung University

Ching‐Hsiang Chen · National Taiwan University of Science and Technology

Liang‐Yih Chen · National Taiwan University of Science and Technology

Yuh‐Jen Cheng

Topics & Keywords

GaN-based semiconductor devices and materials ZnO doping and properties Ga2O3 and related materials

Publication Details

Published in: Research on Chemical Intermediates

Volume 43, Issue 6, pp. 3563-3572

DOI: 10.1007/s11164-016-2430-1

Field-Weighted Citation Impact: 1.61

The study of wet etching on GaN surface by potassium hydroxide solution | Researchclopedia

· Research Center for Applied Science, Academia Sinica