Hydrogen doping in indium oxide: An<i>ab initio</i>study

First-principles density-functional theory is employed to investigate the role of hydrogen impurities in ${\text{In}}_{2}{\text{O}}_{3}$. We find that both interstitial hydrogen $({\text{H}}_{i})$ and substitutional hydrogen $({\text{H}}_{\text{O}})$ act as shallow donors. Our results support recent experiments by Koida et al. [Jpn. J. Appl. Phys. 46, L685 (2007)], which found hydrogen-doped ${\text{In}}_{2}{\text{O}}_{3}$ to be a good candidate for transparent conducting films.