A Method For In-Situ Measurement Of The Film Thickness And Composition Of Films Deposited by Gas Injection In The FIB-SEM

20121 citationsJournal Article

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Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Published in: Microscopy and Microanalysis

Volume 18, Issue S2, pp. 620-621

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