Researchclopedia

Research Researchers Institutions Topics Submit About

Command Palette

Search for a command to run...

Researchclopedia

Research Researchers Institutions About

© 2026 Researchclopedia. Powered by OpenAlex under CC0 license.

The History, Physics, and Applications of the Smart-Cut® Process | Researchclopedia

Back to research

The History, Physics, and Applications of the Smart-Cut® Process

199887 citationsJournal Article

Authors

Topics & Keywords

Silicon and Solar Cell Technologies Advanced Surface Polishing Techniques Integrated Circuits and Semiconductor Failure Analysis

Publication Details

Published in: MRS Bulletin

Volume 23, Issue 12, pp. 35-39

DOI: 10.1557/s088376940002981x

Field-Weighted Citation Impact: 10.06