TOF-SIMS --A powerful tool for practical surface, interface and thin film analysis

SIMS is a surface sensitive mass spectrometry, based upon the emission of positively and negatively charged atomic and molecular surface species. Mass analysis of these secondary ions by time of flight (TOF) instrumentation guarantees parallel mass registration, high mass range, high mass resolution at high transmission, and precise mass determination. In combination with a fine focussed primary ion beam, this results in an extreme sensitivity (1 ppm of one ML) combined with high depth (1 nm) and lateral (50 nm) resolution. Today TOF SIMS is a mature and well established analytical technique. Its extreme sensitivity in combination with its unique sensitivity for even large and involatile molecular species makes the technique indispensable in many high technology areas, ranging from microelectronic, chemistry and material sciences, to nanotechnology and life sciences. This paper outlines TOF SIMS fundamentals and instrumentation, as well as its manifold applications and perspectives.