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Full Aperture Optical Polishing Process: Overview and Challenges

201610 citationsBook Chapter

Authors

Raj Kumar Pal · Academy of Scientific and Innovative Research

Harry Garg · Central Scientific Instruments Organisation

Vinod Karar · Central Scientific Instruments Organisation

Topics & Keywords

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Integrated Circuits and Semiconductor Failure Analysis

Publication Details

Published in: Lecture notes in mechanical engineering

DOI: 10.1007/978-81-322-2740-3_45

Field-Weighted Citation Impact: 5.45

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