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Ion Implantation: Equipment and Techniques

1983136 citationsBook

Authors

H. Ryssel · Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology

H. Glawischnig · Siemens (Germany)

Topics & Keywords

Metal and Thin Film Mechanics Ion-surface interactions and analysis

Publication Details

DOI: 10.1007/978-3-642-69156-0

Field-Weighted Citation Impact: 13.63

Ion Implantation: Equipment and Techniques | Researchclopedia