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THIN FILM DEPOSITION BY MEANS OF PULSED ELECTRON BEAM ABLATION

199534 citationsBook Chapter

Authors

G. Müller · FZI Research Center for Information Technology

M.C. Konijnenberg · FZI Research Center for Information Technology

Geoffrey Krafft · FZI Research Center for Information Technology

C. Schultheiss · FZI Research Center for Information Technology

Topics & Keywords

Electron and X-Ray Spectroscopy Techniques Advancements in Photolithography Techniques Plasma Diagnostics and Applications

Publication Details

Published in: WORLD SCIENTIFIC eBooks

DOI: 10.1142/9789814261425_0004

Field-Weighted Citation Impact: 0.00

THIN FILM DEPOSITION BY MEANS OF PULSED ELECTRON BEAM ABLATION | Researchclopedia