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Doping of semiconductor devices by Laser Thermal Annealing

201660 citationsJournal Article

Authors

Karim Huet · Laser Systems & Solutions of Europe (France)

Fulvio Mazzamuto · Laser Systems & Solutions of Europe (France)

Toshiyuki Tabata · Laser Systems & Solutions of Europe (France)

I. Toqué‐Tresonne · Laser Systems & Solutions of Europe (France)

Yoshihiro Mori · SCREEN (Japan)

Topics & Keywords

Laser Material Processing Techniques Integrated Circuits and Semiconductor Failure Analysis Thin-Film Transistor Technologies

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Materials Science in Semiconductor Processing

Volume 62, pp. 92-102

DOI: 10.1016/j.mssp.2016.11.008

Field-Weighted Citation Impact: 3.11

Doping of semiconductor devices by Laser Thermal Annealing | Researchclopedia