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MEMS Residual Stress Characterization

201512 citationsBook Chapter

Authors

Kuo‐Shen Chen · National Cheng Kung University

Kuang-Shun Ou · National Cheng Kung University

Topics & Keywords

Metal and Thin Film Mechanics Advanced Surface Polishing Techniques Advanced MEMS and NEMS Technologies

Publication Details

Published in: Elsevier eBooks

DOI: 10.1016/b978-0-323-29965-7.00017-8

Field-Weighted Citation Impact: 1.35

MEMS Residual Stress Characterization | Researchclopedia