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Practical surface analysis by auger and X-ray photoelectron spectroscopy

19842,504 citationsJournal Article

Authors

P. Oelhafen · University of Basel

Topics & Keywords

Electron and X-Ray Spectroscopy Techniques Advancements in Photolithography Techniques Surface Roughness and Optical Measurements

Publication Details

Published in: Journal of Electron Spectroscopy and Related Phenomena

Volume 34, Issue 2, pp. 203-203

DOI: 10.1016/0368-2048(84)80044-4

Field-Weighted Citation Impact: 28.83

Practical surface analysis by auger and X-ray photoelectron spectroscopy | Researchclopedia