Nanostructuring using laser-assisted scanning probe microscope

Nanostructures were fabricated using laser irradiating at the conductive tip of an atomic force microscope (AFM). The conductive tip behaves like an antenna, which receives electromagnetic energy from the laser beam and then emits electromagnetic wave in nanometer range. In this study, a commercial atomic force microscope, combined with a 514.5 nm argon ion laser and a vertically-polarized 532 nm Nd:YAG pulsed laser, was utilized for modification on the gold and 1813 photo-resist films. AFM imaging and nanostructure modification were conducted at the contact-constant-height mode. AFM images were obtained right after the laser irradiations to monitor the modification process. The effect of the laser intensity, the optical field enhancement, and the thermal expansion of the tip under laser irradiation are investigated.