Correlated evolution of structure and mechanical loss of a sputtered silica film

Energy dissipation in amorphous coatings severely affects high-precision optical and quantum transducers. In order to isolate the source of coating loss, we performed an extensive study of Raman scattering and mechanical loss of a thermally treated sputtered silica coating. Our results show that loss is correlated with the population of three-membered rings of Si-${\mathrm{O}}_{4}$ tetrahedral units and support the evidence that thermal treatment reduces the density of metastable states separated by a characteristic energy of about 0.5 eV in favor of an increase of the density of states separated by smaller activation energies.